Project information
Study of hybrid deposition process and its application for thin film deposition
- Project Identification
- GP202/08/P038
- Project Period
- 1/2008 - 12/2010
- Investor / Pogramme / Project type
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Czech Science Foundation
- Postdoctoral projects
- MU Faculty or unit
- Faculty of Science
- Keywords
- magnetron sputtering, hybrid PVD-PECVD, hysteresis behaviour, thin film deposition, nanocomposite, BCN
This project focuses on investigation of behaviour of hybrid PVD-PECVD process, which will be used for preparation of nanocomposite n-Ti:C/a-C:H and a-BCN:H materials. In this hybrid deposition process, a gaseous hydrocarbon will be used as a source of carbon instead of its conventional sputtering from magnetron target. Hysteresis behaviour of this process together with properties of deposited thin films will be investigated and compared with those of PVD process. Comparative study for two types of hydrocarbons will be performed. Advanced model of reactive sputtering assuming nonuniform discharge current density will be developed. This model will be extended to accommodate the interaction of gaseous hydrocarbon with all surfaces in the deposition chamber.
Publications
Total number of publications: 37
2011
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Depth profile analyses of nc-TiC/a-C:H coating prepared by balanced magnetron sputtering
Surface & Coatings Technology, year: 2011, volume: 205, edition: July, DOI
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Experimental study of hybrid PVD-PECVD process of metallic target sputtering in argon and acetylene
Year: 2011, type: Conference abstract
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Study of hybrid PVD–PECVD process of Ti sputtering in argon and acetylene
Surface & Coatings Technology, year: 2011, volume: 205, edition: July, DOI
2010
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Behaviour of Hybrid PVD-PECVD in Comparison with Conventional Reactive Magnetron Sputtering.
Year: 2010, type: Conference abstract
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Behaviour of Hybrid PVD-PECVD Process in Comparison with Conventional Reactive Magnetron Sputtering
7th ICRP & 63rd GEC - CONFERENCE PROCEEDINGS, year: 2010
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Behaviour of hybrid PVD-PECVD process of Ti sputtering in argon and acetylene atmosphere
Potential and Applications of Nanotretment of Medical Surface, year: 2010
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Deposition and analyses of nc-TiC/a-C:H coating prepared by balanced magnetron sputtering
Year: 2010, type: Conference abstract
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Deposition and characterization of nc-TiC/a-C:H coatings prepared by hybrid PVD-PECVD
Potencial and Application of Nanotreatment of Medical Surfaces, year: 2010
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Deposition and characterization of n-TiC/a-C:H coatings prepared by hybrid PVD-PECVD
Year: 2010, type: Conference abstract
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Diagnostics of reactive magnetron sputtering
Year: 2010, type: Conference abstract